BARE SiC WAFER
- Rapid optical scans in Brightfield, Dark- field, and DIC Imaging Modes
- A library of analyzers to automatically detect and classify a wide array of common- defect types, e.g. Cracks, Carrots, Octopi
- Artificial Intelligence algorithms to create custom analyzers for further defect types from relatively sparse data sets
- Seamless, in-software view of annotated virtual mosaic and summary statistics, exportable as .csv and integrated with KLARF and SECS/GEM
Top: H26-0155-7, Tile 74. AI Analyzer detects, measures, cassifies and records location of all defects.