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Compound Semiconductors

BARE SiC WAFER

  • Rapid optical scans in Brightfield, Dark- field, and DIC Imaging Modes
  • A library of analyzers to automatically detect and classify a wide array of common- defect types, e.g. Cracks, Carrots, Octopi
  • Artificial Intelligence algorithms to create custom analyzers for further defect types from relatively sparse data sets
  • Seamless, in-software view of annotated virtual mosaic and summary statistics, exportable as .csv and integrated with KLARF and SECS/GEM

Top: H26-0155-7, Tile 74. AI Analyzer detects, measures, cassifies and records location of all defects.